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J Korean Soc Environ Eng > Volume 34(6); 2012 > Article

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J Korean Soc Environ Eng 2012;34(6): 391. doi: https://doi.org/10.4491/KSEE.2012.34.6.391

전자빔 기술을 이용한 반도체 공정의 삼불화질소(NF3) 분해

류재용, 최창용, 김종범, 이상준, 김승곤, 곽희성, 윤영민

Jae Yong Ryu, Chang Yong Choi, Jong Bum Kim, Sang Jun Lee, Seung Gon Kim, Hee Sung Kwak, Young Min Yun

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