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J Korean Soc Environ Eng > Volume 42(10); 2020 > Article
J Korean Soc Environ Eng 2020;42(10): 493-512. doi: https://doi.org/10.4491/KSEE.2020.42.10.493
반도체 제조용 초순수 생산기술 동향 및 국산화 필요성
권병수1 , 이상호2 , 강석태3 , 임재림1
1K-water연구원
2국민대학교 건설시스템공학부
3한국과학기술원 건설 및 환경공학과
Current Research Trends and the Need for Localization in Ultrapure Water Production Facilities in Semiconductor Industries
Boungsu Kwon1 , Sangho Lee2 , Seoktae Kang3 , Jaelim Lim1
1K-water Research Institute
2Department of Civil and Environmental Engineering, Kookmin University
3Department of Civil and Environmental Engineering, Korea Advanced Institute of Science and Technology
Corresponding author  Jaelim Lim ,Tel: 042-870-7523, Fax: 042-870-7619, Email: jllim@kwater.or.kr
Received: September 1, 2020;  Revised: September 16, 2020;  Accepted: September 28, 2020.  Published online: October 31, 2020.
ABSTRACT
Objectives
This study aims to summarize the market status, patent applications, and technology trends for the production of ultrapure water in semiconductor industries. In addition, the potential of technological localization of ultrapure water production facility is reviewed in order to incubate domestic core technologies as well as to reduce the technical dependence to the market stake holders.
Methods
Through the collection and summary of information from global water institute (GWI), market analyst firms in ultrapure water fields, and the patent analysis for the past 10 years, the technological gap between domestic and market leading in Japan, the United States, and Europe were analyzed. In addition, the research trend related to the core removal processes for the production of ultrapure water was also analyzed.
Results and Discussion
As a result of market analysis in the industrial water sector, the capital investment is expected to reach USD 39.9 billion by 2024, with a steady growth of 4.1% per year. The unit processes required for the production of ultrapure water becomes more complex and diversified, and the recent technological advancement has been mainly put on the development of eco-friendly water treatment processes such as electrodeionization (EDI) in order to reduce the chemical usage. In addition, research on the development of new processes for the treatment of hardly degradable trace substances (i.e. urea, THM, IPA, etc.) is actively under investigation. However, the patent analysis revealed that the three Japanese companies occupied 71% of the world’s patents on the ultrapure water production.
Conclusions
In ultrapure water production technology, the design of unit processes is important, and the design of a system that combines and arranges unit processes is the core technology. Thus, the incubation of domestic companies that have ability to design the array of unit processes for ultrapure water production is necessary for the localization of ultrapure water technology. However, although a few companies have completed the commercialization of core technologies, there is lack of the test field to evaluate the long-term performance of products. Therefore, for the development of domestic technologies in the ultrapure water production, it is necessary to construct a test-bed capable of evaluating the performance of domestic products. In addition, it is expected that localization of ultrapure water production technology will be facilitated with the participation of consumers.
Key Words: Ultrapure Water, Market Analysis, Research Trend, Design Technology, Patent Analysis
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